🧠Patent: Laser Management Server and Laser Management Method
Inventors: Jacob Peter Strock, Yuji Minegishi
Submission Date: February 4, 2025
Patent Office: United States (US)
Application Number: 20250291338
📄 Description
A laser management service for maintenance of lasers used in semiconductor lithography using LLM agents. Together, components enable autonomous query handling, intelligent response generation, and precise control of laser systems through integration of agent processing and large language models.
Abstract
A laser management server for a laser device includes a sending and receiving processor receiving a query from outside; a query input processor receiving and decomposing the query, and generating a first query item requiring external information and a second query item without requiring external information; an agent action processor receiving the first query item, acquiring the required external information from unstructured data and structured data, and generating a first agent response; an equipment agent processor receiving the second query item, receiving the first agent response, and generating a query item prompt related to the second query item; a large language model processor receiving the query item prompt, and generating a query item response; and an equipment control processor receiving a first control signal, and transmitting the first control signal to the laser device. The equipment agent processor receives the query item response and generate the first control signal.